Nanometrics Introduces VerteX Rapid
Photoluminescence Mapping System for Compound Semiconductors
VerteX Is First to Accurately Predict Green LED
Emission Wavelength at Wafer Level
Nanometrics, Inc. (Nasdaq: NANO), the leading
supplier of both advanced integrated and standalone metrology equipment for the
semiconductor and related industries, introduced today its VerteX rapid
photoluminescence (PL) mapping system used for compound semiconductor production
control during volume manufacturing of optoelectronic devices, such as light
emitting diodes (LEDs). The tool marks the first automated PL mapping system
that accurately predicts emission wavelengths for green LEDs at the wafer level.
Green LEDs are vital for RGB-based LED displays and solid-state lighting
applications.
This is Nanometrics' initial product launch since
completing its acquisition earlier this year of Accent Optical Technologies,
Inc., a leading supplier of overlay and thin-film metrology and process control
systems.
VerteX's superior control of laser excitation
conditions allows for accurate matching of PL data to electroluminescence (EL)
test information, resulting in faster run-to-run epitaxial layer growth
feedback. This enables the predictive metrics required for volume production of
LEDs, particularly green LEDs.
Conventionally, the exact emission wavelength of a
green LED can only be measured by an electrical test after the wafer has been
fully processed. VerteX, however, has the unique capability to forecast diode
performance before the wafer is fully processed, providing the critical data
needed to actively adjust process controls for optimal epitaxial layer growth '”
the yield-limiting step in LED production. The tool also can be used in
manufacturing a wide range of optoelectronic materials, including ultraviolet
(UV) diode lasers for high-definition DVD and Blu-Ray optical disc
appliances.
'As production volumes increase and tolerances
tighten for epitaxial layers, customers demand a metrology tool that not only
provides accurate measurements, but that can provide the processing data
required to accelerate time to yield. VerteX answers these requirements and
more," said Tom Ryan, Nanometrics' product manager for compound semiconductors.
'In the case of LED processing, VerteX makes possible accurate predictive
processing metrics of green, blue and UV LED emission wavelengths at the wafer
level, a capability that is unmatched in the industry. This system also
demonstrates Nanometrics' commitment to the emerging markets for LEDs, such as
backlighting for LCD TV displays, automotive headlights and solid-state
lighting."
VerteX already has been adopted by two of the world's leading
solid-state lighting manufacturers and is now available commercially. This new
product complements Nanometrics' portfolio of wafer inspection systems,
including the industry-standard RPM2000, desktop PL mapping system, and it adds
another important component to the company's closed-loop advanced process
control (APC) capabilities, enabling a predictive metrics strategy for its
customers.
About Nanometrics:
Nanometrics
is a leader in the design, manufacture and marketing of high-performance process
control metrology systems used in semiconductor manufacturing. Nanometrics
metrology systems measure various thin film properties, critical dimensions,
overlay control and optical, electrical and material properties, including the
structural composition of silicon and compound semiconductor devices, during
various steps of the manufacturing process. These systems enable semiconductor
manufacturers to improve yields, increase productivity and lower their
manufacturing costs. The Company maintains its headquarters in Milpitas,
California, with sales and service offices worldwide. Nanometrics is traded on
NASDAQ Global Market under the symbol NANO. Nanometrics' website is http://www.nanometrics.com.
Source: nanometrics
